Concepedia

C Liu

CL

Statistics

Publications

2

Citations

78

H-Index

2

Active since

1997

Affiliations

National Institutes of Applied Research(Current)

National Yang Ming Chiao Tung University

C Liu is an author at National Institutes of Applied Research specializing in chemical engineering, engineering, and surface polishing.

Top concepts

Publications per year

1997–1997

2

Publications

2

Effects of corrosion environments on the surface finishing of copper chemical mechanical polishing

M.T Wang, M. S. Tsai, C Liu et al. · Thin Solid Films · 1997 · 56 citations

, , +9

Chemical-mechanical polishing of low-dielectric-constant spin-on-glasses: film chemistries, slurry formulation and polish selectivity

Yu‐Young Wang, C Liu, Shuwen Chang et al. · Thin Solid Films · 1997 · 22 citations

, , +11

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