Chemical-mechanical polishing of low-dielectric-constant spin-on-glasses: film chemistries, slurry formulation and polish selectivity - Concepedia

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Chemical-mechanical polishing of low-dielectric-constant spin-on-glasses: film chemistries, slurry formulation and polish selectivity

22

Citations

2

References

1997

Year

Yu‐Young Wang, C Liu, Shuwen Chang, M. S. Tsai, M. S. Feng, Wei‐Tsu Tseng

Thin Solid Films

Materials ScienceChemical-mechanical PolishingChemical EngineeringGlass-ceramicEngineeringOptical GlassSurface ScienceApplied PhysicsPolish SelectivityGlass MaterialFunctional GlassSurface PolishingSlurry FormulationAmorphous Metal

References

	Year	Citations

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