Statistics
Publications
2
Citations
76
H-Index
2
Active since
1999
Affiliations
Shao-Yu Chiu is an author at National Yang Ming Chiao Tung University specializing in corrosion, chemical engineering, and engineering.
Publications per year
1999–2005
2
2
High-selectivity damascene chemical mechanical polishing
Shao-Yu Chiu, Ying-Lang Wang, Chuan‐Pu Liu et al. · Thin Solid Films · 2005 · 34 citations
Materials Science, Materials Engineering, Chemical Engineering +6
1–2 of 2