Thomas E. Seidel

Thin film atomic layer deposition equipment for semiconductor processing

Ofer Sneh, R. Clark-Phelps, A. Londergan et al. · Thin Solid Films · 2002 · 287 citations

Engineering, Thin-film Fabrication, Surface Science +6

ALD of Hafnium Oxide Thin Films from Tetrakis(ethylmethylamino)hafnium and Ozone

Xinye Liu, Sasangan Ramanathan, Ana Longdergan et al. · Journal of The Electrochemical Society · 2005 · 200 citations

Aluminium Nitride, Optical Materials, Engineering +16

The redistribution of implanted dopants after metal-silicide formation

M. Wittmer, Thomas E. Seidel · Journal of Applied Physics · 1978 · 115 citations

Metal-silicide Formation, Engineering, Chemistry +16

Absorption Edge in Degenerate <i>p</i>-Type GaAs

I. Kudman, Thomas E. Seidel · Journal of Applied Physics · 1962 · 97 citations · Full text

Semiconductors, Quantum Science, Electrical Engineering +15

Physics, stability, and dynamics of supply networks

Dirk Helbing, Stefan Lämmer, Thomas E. Seidel et al. · Physical Review E · 2004 · 97 citations · Full text

System Stability, Engineering, Supply Network +15