Thin Solid Films · 1992 · 17 citations · 19 references
Natural SciencesMaterials EngineeringMaterials ScienceMaterials ChemistrySemiconductor MaterialsThin FilmsChemical Vapor DepositionSemiconductor SurfacesSemiconductor Thin FilmsSurface PhysicsThin-film DepositionThin-film MaterialsChemical Vapor Deposition MaterialsImpuritiesImpurity IncorporationSilicon Chemical Vapor DepositionThermal DecompositionThermal Decomposition ReactionsThin Oxide FilmsVacuum Conditions
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Low energy electrons and surface chemistry
Steven L. Suib · Journal of Solid State Chemistry · 1987 · 915 citations
Natural Sciences, Chemistry, Physics +14
<i>Low-Energy Electrons and Surface Chemistry</i>
G. Ertl, J. Küppers, Robert L. Park · Physics Today · 1976 · 773 citations
Natural Sciences, Chemistry, Physics +12
A comparative study of Ga(CH3)3 and Ga(C2H5)3 in the mombe of GaAs
N. Pütz, H. Heinecke, M. Heyen et al. · Journal of Crystal Growth · 1986 · 178 citations