Electronics Letters · 1992 · 40 citations · 3 references
Natural SciencesMaterials ScienceMaterials CharacterizationMicrofabricationOpticsAtomic Force MicroscopyPhysical OpticsSurface MetrologySurface RoughnessSurface Roughness EffectsWaveguidesAtomic Force Microscopy RoughnessBuried Channel DevicesChannel RoughnessChannel WaveguidesRoughnessSurface Roughness MeasurementSurface Roughness ModelingThin Film Surface Roughness
An atomic force microscope is employed in a novel method for measuring the edge roughness of masks used in the fabrication of rectangular-core buried channel waveguides. Light attenuation due to scattering loss from the sides of the core can then be estimated using a simple statistical model of the data.
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Novel optical approach to atomic force microscopy
Gerhard Meyer, Nabil M. Amer · Applied Physics Letters · 1988 · 1.3K citations
Atomic Resolution with Atomic Force Microscope
G. Binnig, Ch. Gerber, E. Stoll et al. · Europhysics Letters (EPL) · 1987 · 548 citations