Concepedia

Publication | Closed Access

Influence of porosity on electrical properties of low-k dielectrics

DOI

40

Citations

12

References

2011

Year

Els Van Besien, Marianna Pantouvaki, Larry Zhao, David De Roest, Mikhaı̈l R. Baklanov, Zsolt Tökei, Gerald Beyer
Microelectronic Engineering

References

YearCitations

Page 1