Fabrication of self-supporting antireflection-structured film by UV–NIL

Broadband antireflection gratings fabricated upon silicon substrates

Yoshiaki Kanamori, Masahide Sasaki, Kazuhiro Hane · Optics Letters · 1999 · 436 citations

Natural Sciences, Materials Science, Physics +14

Fabrication of Microcone Array for Antireflection Structured Surface Using Metal Dotted Pattern

Hiroshi Toyota, Koji Takahara, Masato Okano et al. · Japanese Journal of Applied Physics · 2001 · 145 citations

Natural Sciences, Materials Engineering, Materials Science +17

Adhesion of Electroformed Copper and Nickel to Plastic Laminates

D. J. Arrowsmith · Transactions of the IMF · 1970 · 66 citations

Natural Sciences, Materials Engineering, Materials Science +12

XPS study of the degradation mechanism of fluorinated anti-sticking treatments used in UV nanoimprint lithography

Delphine Truffier‐Boutry, A. Beaurain, R. Galand et al. · Microelectronic Engineering · 2009 · 44 citations

Engineering, Materials Engineering, Materials Science +17

Analysis on Deterioration Mechanism of Release Layer in Nanoimprint Process

Yasuhiko Tada, Hiroshi Yoshida, Akihiro Miyauchi · Journal of Photopolymer Science and Technology · 2007 · 43 citations · Full text

Engineering, Materials Engineering, Materials Science +15