Concepedia

Selective etching and epitaxial refilling of silicon wells in the system SiH4/HCl/H2

M. Druminski

Journal of Crystal Growth · 1975 · 19 citations · 3 references

DOI

Concepts

References

3

Epitaxial Silicon Films by the Hydrogen Reduction of SiCl[sub 4]

H. C. Theuerer · Journal of The Electrochemical Society · 1961 · 158 citations

, , +17

Selective Epitaxial Deposition of Silicon

B.D. Joyce, J. A. Baldrey · Nature · 1962 · 117 citations

, , +12

The combination of two growth methods for the epitaxial deposition of silicon films on insulating substrates

M. Druminski, H. Schlötterer · Journal of Crystal Growth · 1972 · 11 citations

, , +16