Concepedia

Selective Epitaxial Deposition of Silicon

B.D. Joyce, J. A. Baldrey

Nature · 1962 · 117 citations · 2 references

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Concepts

References

Concepts

EngineeringMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor DevicesSemiconductor MaterialsEpitaxial GrowthEtching ProcessesSemiconductor Device MaterialsSemiconductor Thin FilmsSilicon MaterialsThin-film DepositionEpitaxial MaterialsSelective DepositionSilicon Epitaxy

References

2

Stabilization of Silicon Surfaces by Thermally Grown Oxides*

Mena Atalla, Eileen Tannenbaum, E. J. Scheibner · Bell System Technical Journal · 1959 · 257 citations

Natural Sciences, Materials Engineering, Materials Science +17

Epitaxial Silicon Films by the Hydrogen Reduction of SiCl[sub 4]

H. C. Theuerer · Journal of The Electrochemical Society · 1961 · 158 citations

Natural Sciences, Chemistry, Materials Science +17