Concepedia

Control of reactive sputtering processes

W.D. Sproul, D.J. Christie, D.C. Carter

Thin Solid Films · 2005 · 395 citations · 23 references

DOI

Concepts

References

23

A novel pulsed magnetron sputter technique utilizing very high target power densities

V. Kouznetsov, K. Macák, Jochen M. Schneider et al. · Surface and Coatings Technology · 1999 · 1.1K citations

, , +7

Handbook of thin film process technology

W Steckelmacher · Vacuum · 1996 · 285 citations

, , +12

Ionized sputter deposition using an extremely high plasma density pulsed magnetron discharge

K. Macák, V. Kouznetsov, Jochen M. Schneider et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2000 · 275 citations

, , +17

Gas density reduction effects in magnetrons

S. M. Rossnagel · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1988 · 274 citations

, , +16

High power pulsed magnetron sputtered CrN films

Arutiun P. Ehiasarian, W.‐D. Münz, Lars Hultman et al. · Surface and Coatings Technology · 2002 · 272 citations

, , +8