Materials science forum · 1998 · 18 citations · 0 references
Natural SciencesMaterials EngineeringMaterials ScienceInorganic ChemistryMaterials ChemistrySemiconductor MaterialsDefect CharacterizationDefect ThermodynamicsDefectsDefects In Electronic MaterialsSemiconductor DefectsSemiconductor Device MaterialsDefect CentersOxygen VacanciesOxygen Vacancy ChemistryOxygen Vacancy FormationSilicon Carbide