Effect of initial process conditions on the structural properties of AlN films

The toughest transistor yet [GaN transistors]

L.F. Eastman, Umesh K. Mishra · IEEE Spectrum · 2002 · 231 citations

Engineering, Electrical Engineering, Materials Science +17

Low-temperature growth of piezoelectric AlN film by rf reactive planar magnetron sputtering

Tadashi Shiosaki, Tomoko Yamamoto, Tomoyuki Oda et al. · Applied Physics Letters · 1980 · 165 citations

Natural Sciences, Materials Engineering, Materials Science +15

Inversion domains in AlN grown on (0001) sapphire

Jacek B. Jasiński, Z. Liliental‐Weber, Qing Paduano et al. · Applied Physics Letters · 2003 · 116 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +11

Growth of AlN on sapphire substrates by using a thin AlN buffer layer grown two-dimensionally at a very low V/III ratio

Yasuo Ohba, Rie Sato · Journal of Crystal Growth · 2000 · 56 citations

Natural Sciences, Materials Engineering, Materials Science +16

Two-step Process for the Metalorganic Chemical Vapor Deposition Growth of High Quality AlN Films on Sapphire

Qing Paduano, David Weyburne · Japanese Journal of Applied Physics · 2003 · 40 citations

Natural Sciences, Materials Engineering, Materials Science +17