Publication | Closed Access

Growth of AlN on sapphire substrates by using a thin AlN buffer layer grown two-dimensionally at a very low V/III ratio

Materials ScienceMaterials EngineeringAluminium NitrideEngineeringSapphire SubstratesCrystal Growth TechnologySurface ScienceApplied PhysicsAluminum Gallium NitrideGallium OxideLow V/iii Ratio