Corner effect in multiple-gate SOI MOSFETs

Xiong, Park, Colinge

2003 · 49 citations · 3 references

Concepts

Abstract

Separate formation of channels in corners and sides of triple-gate SOI MOSFETs is observed. This phenomenon degrades the I/sub on//I/sub off/ ratio and the subthreshold slope, but it is present only if high doping concentrations and corners with a small radius of curvature are used.

References

3