Concepedia

Publication | Closed Access

Micromachined valve with hydraulically, actuated membrane, subsequent to a thermoelectrically controlled bimorph cantilever

DOI

20

Citations

5

References

1993

Year

H.-P. Trah, H. Baumann, C. Döring, H. Goebel, T. Grauer, M.S. Mettner
Sensors and Actuators A Physical

References

YearCitations

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