Concepedia

Plasma synthesis of metallic and composite thin films with atomically mixed substrate bonding

I.G. Brown, André Anders, S. Anders, M.R. Dickinson, Iskren Ivanov, R.A. MacGill, Xiang Yao, K. M. Yu

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1993 · 90 citations · 15 references

DOI

Concepts

References

15

Plasma source ion-implantation technique for surface modification of materials

J. R. Conrad, Joachim Radtke, R.A. Dodd et al. · Journal of Applied Physics · 1987 · 1.1K citations

, , +16

High current ion source

I.G. Brown, James E. Galvin, R.A. MacGill · Applied Physics Letters · 1985 · 237 citations

, , +13

Plasma immersion ion implantation using plasmas generated by radio frequency techniques

J. Tendys, I.J. Donnelly, M.J. Kenny et al. · Applied Physics Letters · 1988 · 221 citations

, , +13

Vacuum arc ion charge-state distributions

I.G. Brown, X. Godechot · IEEE Transactions on Plasma Science · 1991 · 221 citations · Full text

, , +13

Metal vapor vacuum arc ion source

I.G. Brown, James E. Galvin, B. Gavin et al. · Review of Scientific Instruments · 1986 · 182 citations

, , +13