Publication | Closed Access

Real-time monitoring of MOVPE device growth by reflectance anisotropy spectroscopy and related optical techniques

Materials ScienceReal-time MonitoringOptical MaterialsEngineeringReflectance Anisotropy SpectroscopyOptical PropertiesSpectroscopyOptical SensorApplied PhysicsOptical TestingMovpe Device GrowthInstrumentationOptical SpectroscopyOptical EngineeringOptoelectronicsSpectroscopic Method