Concepedia

Emergence of Ag particles and their effects on the mechanical properties of TaN–Ag nanocomposite thin films

C.C. Tseng, J.H. Hsieh, Weite Wu, S.Y. Chang, C.L. Chang

Surface and Coatings Technology · 2007 · 22 citations · 21 references

DOI

Concepts

References

21

Magnetron sputtering of hard nanocomposite coatings and their properties

J. Musil, J. Vlček · Surface and Coatings Technology · 2001 · 233 citations

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Mechanical properties of superhard nanocomposites

S. Vepřek, A. S. Argon · Surface and Coatings Technology · 2001 · 173 citations

, , +14

CrN–Ag self-lubricating hard coatings

Chris L. Mulligan, Daniel Gall · Surface and Coatings Technology · 2005 · 161 citations

, , +10

Reactive sputter deposition and properties of TaxN thin films

Tommi Riekkinen, J. M. Molarius, Tomi Laurila et al. · Microelectronic Engineering · 2002 · 159 citations

, , +14

Crystallographic and morphological characterization of reactively sputtered Ta, TaN and TaNO thin films

M. Stavrev, D. Fischer, Christian Wenzel et al. · Thin Solid Films · 1997 · 155 citations

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