Thermal oxidation of outdiffusing SiO with permeating O2 in a SiO2 film studied by angle-resolved X-ray photoelectron spectroscopy

General Relationship for the Thermal Oxidation of Silicon

B. E. Deal, Andrew S. Grove · Journal of Applied Physics · 1965 · 3.4K citations

Natural Sciences, Chemistry, Materials Science +17

Reaction of Oxygen with Si(111) and (100): Critical Conditions for the Growth of SiO2

F. W. Smith, G. Ghidini · Journal of The Electrochemical Society · 1982 · 293 citations

Natural Sciences, Chemistry, Materials Science +17

Growth mechanism of thin silicon oxide films on Si(100) studied by medium-energy ion scattering

E. P. Gusev, Hongcheng Lu, T. Gustafsson et al. · Physical review. B, Condensed matter · 1995 · 218 citations

Natural Sciences, Materials Science, Physics +17

Diffusion of Oxygen in Vitreous Silica

E. W. Sucov · Journal of the American Ceramic Society · 1963 · 161 citations

Natural Sciences, Chemistry, Materials Science +15

A revised model for the oxidation of Si by oxygen

Joseph Blanc · Applied Physics Letters · 1978 · 109 citations

Natural Sciences, Chemistry, Materials Science +17