Publication | Closed Access
Thermal oxidation of outdiffusing SiO with permeating O2 in a SiO2 film studied by angle-resolved X-ray photoelectron spectroscopy
53
Citations
15
References
1997
Year
Materials ScienceSio2 FilmEngineeringOxidation ResistanceOxide ElectronicsSurface ScienceApplied PhysicsThermal OxidationSilicon On Insulator
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