Low thermal budget surface preparation of Si and SiGe - Concepedia

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Low thermal budget surface preparation of Si and SiGe

38

Citations

29

References

2003

Year

Alexandra Abbadie, Jean‐Michel Hartmann, P. Holliger, M.N. Séméria, P. Besson, P. Gentile

Applied Surface Science

Materials EngineeringMaterials ScienceEngineeringMicrofabricationSurface ScienceApplied PhysicsSemiconductor Device FabricationElectronic PackagingSilicon On InsulatorMicroelectronicsThermal EngineeringSurface Processing

References

	Year	Citations

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