Concepedia

Electron microscopy study of SiC obtained by the carbonization of Si(111)

F. J. Pacheco, Ana M. Sánchez, Sergio I. Molina, D. Araújo, J. Devrajan, A. J. Steckl, R. Garcı́a

Thin Solid Films · 1999 · 11 citations · 3 references

DOI

Concepts

References

3

Mosaic structure in epitaxial thin films having large lattice mismatch

V. Srikant, James S. Speck, David R. Clarke · Journal of Applied Physics · 1997 · 448 citations

, , +17

Epitaxial growth of beta -SiC on Si by RTCVD with C/sub 3/H/sub 8/ and SiH/sub 4/

A. J. Steckl, J.P. Li · IEEE Transactions on Electron Devices · 1992 · 120 citations

, , +17

Structural characterization of nanometer SiC films grown on Si

J. P. Li, A. J. Steckl, I. Golecki et al. · Applied Physics Letters · 1993 · 81 citations

, , +15