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High energy Au-implantation into silicon: Radiation damage and microscopical distribution of implanted atoms

Materials ScienceIon ImplantationEngineeringCrystalline DefectsPhysicsNanotechnologyRadiation EffectApplied PhysicsRadiation DamageSemiconductor Device FabricationHigh Energy Au-implantationSilicon On InsulatorImplanted Atoms