Journal of Applied Physics · 1989 · 19 citations · 19 references
EngineeringMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor DevicesSemiconductor MaterialsCarrier TransportIon ImplantationSemiconductor DefectsSemiconductor Device MaterialsSurface PassivationThermal Properties Of SemiconductorsCadmium TellurideCarrier LifetimeCarrier MobilityCarrier Mobility-lifetime ProductPassivationPassivation Of SemiconductorsPhotoconductivityTransient Current Spectroscopy
A passivation of deep levels in the bulk has been observed by thermally stimulated currents and photoinduced current transient spectroscopy for well-defined conditions of hydrogen implantation into high-resistivity, chlorine-compensated traveling heater method grown CdTe crystals. The influence of ion-induced damage during implantation has been evaluated and the passivation effect on deep levels in the bulk, especially in the range 0.3–0.4 eV, has been clearly identified. This passivation introduces a strong increase of the mobility carrier lifetime product, as shown by photoconductivity measurements, as well as an increase of resistivity. Finally, the stability of this compensation by hydrogen has been investigated.
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Hydrogen in crystalline semiconductors
S. J. Pearton, J. W. Corbett, Tiansheng Shi · Applied Physics A · 1987 · 921 citations
Neutralization of Shallow Acceptor Levels in Silicon by Atomic Hydrogen
J. I. Pánkové, David Carlson, J. E. Berkeyheiser et al. · Physical Review Letters · 1983 · 455 citations
Donor neutralization in GaAs(Si) by atomic hydrogen
J. Chevallier, W. C. Dautremont–Smith, C. W. Tu et al. · Applied Physics Letters · 1985 · 234 citations
Hydrogenation of shallow-donor levels in GaAs
S. J. Pearton, W. C. Dautremont–Smith, J. Chevallier et al. · Journal of Applied Physics · 1986 · 175 citations
Hydrogen passivation of point defects in silicon
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