Publication | Closed Access
Combination of excimer laser micromachining and replication processes suited for large scale production
92
Citations
6
References
1995
Year
Advanced Laser ProcessingEngineeringMicromachinesMicrofabricationLaser Micro-processingReplication ProcessesMechanical EngineeringLarge Scale ProductionLaser Processing TechnologyLaser MicromachiningMicromachiningLaser-assisted DepositionMicrofluidicsMicro-optical Component3D PrintingExcimer Lasers
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