Publication | Closed Access
Arsenic overlayer on Si(111): Removal of surface reconstruction
174
Citations
11
References
1986
Year
Materials ScienceMaterials EngineeringSurface CharacterizationEngineeringPhysicsSurface AnalysisSurface ScienceApplied PhysicsClean SiSiliceneAnnealed SiArsenic OverlayerSilicon On InsulatorMicroelectronicsComplex Reconstruction CharacteristicSurface Reconstruction
The complex reconstruction characteristic of annealed Si(111) surfaces is removed by the interaction of As with the clean Si(111) 7\ifmmode\times\else\texttimes\fi{}7 surface. Surface-sensitive core-level spectroscopy measurements of the Si(111):As 1\ifmmode\times\else\texttimes\fi{}1 surface reveal a well-ordered surface with threefold-coordinated As atoms replacing the Si atoms in the outermost layer. The absence of dangling bonds in this structure leads to an unreconstructed surface which is highly resistant to contamination.
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