Chemical reaction engineering in the design of CVD reactors

Laser-Induced Fluorescence Measurements and Kinetic Analysis of Si Atom Formation in a Rotating Disk Chemical Vapor Deposition Reactor

Pauline Ho, Michael E. Coltrin, W.G. Breiland · The Journal of Physical Chemistry · 1994 · 122 citations

Natural Sciences, Chemical Engineering, Chemistry +13

Micro-reaction engineering applications of reaction engineering to processing of electronic and photonic materials

Klavs F. Jensen · Chemical Engineering Science · 1987 · 82 citations

Engineering, Materials Engineering, Materials Science +16

Micro/Macrocavity Method Applied to the Study of the Step Coverage Formation Mechanism of SiO2 Films by LPCVD

Kazunori Watanabe, Hiroshi Komiyama · Journal of The Electrochemical Society · 1990 · 62 citations

Natural Sciences, Materials Engineering, Materials Science +16

Temperature dependence of the sticking probability and molecular size of the film growth species in an atmospheric chemical vapor deposition process to form AlN from AlCl3 and NH3

H. J. Kim, Yusuke Egashira, Hiroshi Komiyama · Applied Physics Letters · 1991 · 53 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

New test structure to identify step coverage mechanisms in chemical vapor deposition of silicon dioxide

Lie-Yea Cheng, J.P. McVittie, Krishna C. Saraswat · Applied Physics Letters · 1991 · 52 citations

Natural Sciences, Materials Engineering, Materials Science +16