Concepedia
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1984 · 46 citations · 35 references
Materials EngineeringIon ImplantationSiliceneChemistrySilicon On Insulator
35
Criteria for bombardment-induced structural changes in non-metallic solids
H. M. Naguib, Roger Kelly · Radiation Effects · 1975 · 541 citations
Mineral Physic, Engineering, Impact (Mechanics) +21
C.M.O.S. devices fabricated on buried SiO <sup>2</sup> layers formed by oxygen implantation into silicon
K. Izumi, M. Doken, Hisashi Ariyoshi · Electronics Letters · 1978 · 535 citations
Formation of SiO<sub>2</sub> Films by Oxygen-Ion Bombardment
Atsutomo Tooi · Japanese Journal of Applied Physics · 1966 · 102 citations
Materials Engineering, Engineering, Surface Science +5
Formation of buried insulating layers in silicon by the implantation of high doses of oxygen
P.L.F. Hemment, E.A. Maydell-Ondrusz, K.G. Stephens et al. · Nuclear Instruments and Methods in Physics Research · 1983 · 72 citations
Materials Science, Ion Implantation, Engineering +8
Surface Silicon Crystallinity and Anomalous Composition Profiles of Buried SiO<sub>2</sub> and Si<sub>3</sub>N<sub>4</sub> Layers Fabricated by Oxygen and Nitrogen Implantation in Silicon
Satoshi Maeyama, Kenji Kajiyama · Japanese Journal of Applied Physics · 1982 · 70 citations
Engineering, Buried Sio 2, Integrated Circuits +16