Concepedia

Publication | Closed Access

Reactive ion etching with end point detection of microstructured Mo/Si multilayers by optical emission spectroscopy

DOI

13

Citations

13

References

2000

Year

L. Dreeskornfeld, R. Segler, G. Haindl, O. Wehmeyer, Steffen Rahn, E. Majková, U. Kleineberg, U. Heinzmann, P. Hudek, I. Kostič
Microelectronic Engineering

References

YearCitations

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