Microstructure of Zn-Al4 alloy microcastings by micro precision casting based on metal mold

Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming, and plastic moulding (LIGA process)

E. W. Becker, W. Ehrfeld, Patric Hagmann et al. · Microelectronic Engineering · 1986 · 958 citations

Engineering, Materials Engineering, Materials Science +16

A comparative study of Pd/Sn/Au, Au/Ge/Au/Ni/Au, Au-Ge/Ni and Ni/Au-Ge/Ni ohmic contacts to n-GaAs

Md. Shafiqul Islam, P.J. McNally · Microelectronic Engineering · 1998 · 606 citations

Engineering, Electrical Engineering, Materials Science +14

Micromilling of metal alloys with focused ion beam–fabricated tools

David P. Adams, M. J. Vasile, Gilbert L. Benavides et al. · Precision Engineering · 2001 · 131 citations

Engineering, Materials Engineering, Materials Science +14

Various replication techniques for manufacturing three-dimensional metal microstructures

R. Ruprecht, T. Benzler, Thomas Hanemann et al. · Microsystem Technologies · 1997 · 68 citations

Engineering, Manufacturing Engineering, Materials Engineering +11

Construction and testing of a nanomachining instrument

Wei Gao, R.J. Hocken, John Patten et al. · Precision Engineering · 2000 · 55 citations

Engineering, Materials Engineering, Materials Science +12