Various replication techniques for manufacturing three-dimensional metal microstructures
R. Ruprecht,
T. Benzler,
Thomas Hanemann,
K. Müller,
J. Konys,
Volker Piotter,
G. Schanz,
L.-P. Schmidt,
A. Thies,
H. Wöllmer,
Microsystem Technologies · 1997 · 68 citations · 0 references