Concepedia

Studies on measuring surface adhesion between sidewalls in boron doped ultrananocrystalline diamond based microelectromechanical devices

Federico Buja, Jaap Kokorian, Anirudha V. Sumant, W. Merlijn van Spengen

Diamond and Related Materials · 2015 · 12 citations · 36 references

Open access

Concepts

EngineeringMaterials EngineeringMaterials ScienceMicroelectromechanical SystemsMicrofabricationSurface ScienceMicroelectromechanical SensorsMicrofabrication MaterialsMicrofabrication MetrologySurface PhysicsSurface RoughnessThin Film AdhesionBoron-doped Diamond ElectrodesMicrocontact AdhesionMicroelectromechanical ActuatorsSurface AdhesionSurface EffectsWet Surface Adhesion

References

36

Critical Review: Adhesion in surface micromechanical structures

Roya Maboudian, Roger T. Howe · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1997 · 830 citations

Engineering, Materials Engineering, Materials Science +17

The elastic contact of a rough surface

A.W. Bush, R.D. Gibson, T. R. Thomas · Wear · 1975 · 788 citations

Engineering, Materials Science, Physics +14

Handbook of Surface Metrology

Precision Engineering · 1994 · 718 citations

Engineering, Materials Engineering, Materials Science +12

Hygroscopic properties of carbon and diesel soot particles

E. Weingartner, H. Burtscher, Urs Baltensperger · Atmospheric Environment · 1997 · 521 citations

Natural Sciences, Chemical Engineering, Air Pollution +9

IC-processed electrostatic micromotors

Long-Shen Fan, Yu‐Chong Tai, R.S. Muller · Sensors and Actuators · 1989 · 488 citations