Concepedia

Publication | Closed Access

ICP etching of SiC

DOI

54

Citations

31

References

1998

Year

J. J. Wang, E. S. Lambers, S. J. Pearton, Mikael Östling, Carl‐Mikael Zetterling, J. M. Grow, F. Ren, R. J. Shul
Solid-State Electronics

References

YearCitations

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