Concepedia
Statistics
Publications
16
Citations
448
H-Index
14
Active since
1993
Affiliations
New Jersey Institute of Technology(Current)
University of Florida
KTH Royal Institute of Technology
Olin Corporation (United States)
Sandia National Laboratories
J. M. Grow is an author at New Jersey Institute of Technology specializing in engineering, applied physics, and materials science.
Top concepts
EngineeringApplied PhysicsMaterial ScienceSurface ScienceMaterials EngineeringChemical EngineeringChemistryThin FilmsMicroelectronicsElectronic Materials
Publications per year
1993–2025
Inductively coupled plasma etching of bulk 6H-SiC and thin-film SiCN in NF3 chemistries
J. J. Wang, E. S. Lambers, S. J. Pearton et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1998 · 64 citations
Materials Science, Materials Engineering, Engineering +12
ICP etching of SiC
J. J. Wang, E. S. Lambers, S. J. Pearton et al. · Solid-State Electronics · 1998 · 54 citations
Materials Engineering, Materials Science, Engineering +6
Comparison of dry etch chemistries for SiC
Garrett McDaniel, J. W. Lee, E. S. Lambers et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1997 · 49 citations
Materials Engineering, Materials Science, Dry Etch Chemistries +13
Low pressure chemical vapor deposition of B-N-C-H films from triethylamine borane complex
R. Lévy, E. Mastromatteo, J. M. Grow et al. · Journal of materials research/Pratt's guide to venture capital sources · 1995 · 37 citations
Chemical Engineering, Boron Nitride, Engineering +8
The effect of liquid gallium on the strengths of stainless steel and thermoplastics
K. A. Narh, Vivek P. Dwivedi, J. M. Grow et al. · Journal of Materials Science · 1998 · 27 citations
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