Concepedia

J. J. Wang

JJ

Statistics

Publications

1

Citations

64

H-Index

1

Active since

1998

Affiliations

New Jersey Institute of Technology(Current)

J. J. Wang is an author at New Jersey Institute of Technology specializing in semiconductor device materials, source power, and electronic materials.

Publications per year

1998–1998

1

Publications

1

Inductively coupled plasma etching of bulk 6H-SiC and thin-film SiCN in NF3 chemistries

J. J. Wang, E. S. Lambers, S. J. Pearton et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1998 · 64 citations

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