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The compressive stress transition in Al, V, Zr, Nb and W metal films sputtered at low working pressures

Materials ScienceMaterials EngineeringEngineeringCompressive Stress TransitionSevere Plastic DeformationApplied PhysicsMicrostructure-strength RelationshipThin FilmsW Metal FilmsWork HardeningMechanics Of MaterialsMicrostructureHigh Strain Rate