Internal stresses in sputtered chromium

Handbook of Thin Film Technology

L. I. Maissel, R. Glang, Paul P. Budenstein · Journal of The Electrochemical Society · 1971 · 2.8K citations

Natural Sciences, Materials Engineering, Materials Science +12

Influence of apparatus geometry and deposition conditions on the structure and topography of thick sputtered coatings

John A. Thornton · Journal of Vacuum Science and Technology · 1974 · 2.3K citations

Natural Sciences, Materials Engineering, Materials Science +17

Metallurgical Thermochemistry.

A. V. Bradshaw · Chemical Engineering Science · 1968 · 548 citations

Influence of substrate temperature and deposition rate on structure of thick sputtered Cu coatings

John A. Thornton · Journal of Vacuum Science and Technology · 1975 · 436 citations

Natural Sciences, Materials Engineering, Materials Science +17

Gas Incorporation into Sputtered Films

Harold F. Winters, E. Kay · Journal of Applied Physics · 1967 · 233 citations

Natural Sciences, Materials Engineering, Materials Science +16