Sensors and Actuators B Chemical · 2006 · 45 citations · 24 references
EngineeringSystems EngineeringMicroelectromechanical SystemsMicrofabricationSensorsMems SensorsMicroelectromechanical SensorsTemperature ControlTemperature MeasurementTemperature SensorsThermal SensorsHigh-temperature MemsMems Thermal SensorsMicrofabricated Temperature SensorsMiniaturized Temperature SensorsTemperature Sensor Control
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Smart single-chip gas sensor microsystem
Christoph Hagleitner, Andreas Hierlemann, D. Lange et al. · Nature · 2001 · 614 citations
Engineering, Chemical Engineering, Electrical Engineering +12