SURFACE CHARGE TRANSPORT IN SILICON

W.E. Engeler, J.J. Tiemann, R.D. Baertsch

Applied Physics Letters · 1970 · 60 citations · 7 references

Concepts

Abstract

Surface charge was successfully transported by means of a series of overlapping conductor-insulator-semiconductor capacitor plates. The transport mechanism involves a field-driven diffusionlike phenomenon which is analyzed theoretically, and the results are compared to experiments performed on simple structures.

References

7