Concepedia

Inductively coupled r.f. plasma assisted chemical vapour deposition of diamond-like carbon coatings

Annick Vanhulsel, Jean‐Pierre Célis, E.H.A. Dekempeneer, J. Meneve, J. Smeets, K. Vercammen

Diamond and Related Materials · 1999 · 36 citations · 27 references

DOI

Concepts

References

27

Raman ‘‘fingerprinting’’ of amorphous carbon films

M. A. Tamor, W. C. Vassell · Journal of Applied Physics · 1994 · 960 citations

, , +14

Plasma potentials of 13.56-MHz rf argon glow discharges in a planar system

Klaus Köhler, J. W. Coburn, D. E. Horne et al. · Journal of Applied Physics · 1985 · 399 citations

, , +13

Two-dimensional modeling of high plasma density inductively coupled sources for materials processing

Peter L. G. Ventzek, Robert J. Hoekstra, Mark J. Kushner · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1994 · 338 citations

, , +17

Atomic constraint in hydrogenated ‘‘diamond-like’’ carbon

M. A. Tamor, W. C. Vassell, Keith R. Carduner · Applied Physics Letters · 1991 · 249 citations

, , +14

Novel radio-frequency induction plasma processing techniques

John H. Keller, John Forster, Michael Barnes · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1993 · 241 citations

, , +14