2010 · 13 citations · 3 references
EngineeringElectrical EngineeringMicroelectronicsMicrofabricationMicrowave EngineeringEtching ProcessesMask FabricationMems FabricationMicrofabrication ProcessesMicrowave AmplifiersMicrowave Integrated CircuitsDeep Reactive Ion EtchingDeep Ultraviolet LithographyDevice FabricationExtreme Ultraviolet LithographyReactive Ion Etching
A 50 watt CW 220 GHz sheet beam amplifier is under development at NRL. We report on microfabrication techniques used to construct a grating-based amplifier circuit using Ultraviolet Lithography (UV-LIGA) and Deep Reactive Ion etching (DRIE).
3
Wave dispersion and growth analysis of low-voltage grating Čerenkov amplifiers
J. Joe, J.E. Scharer, John H. Booske et al. · Physics of Plasmas · 1994 · 54 citations