High-density MIM capacitors with HfO2 dielectrics - Concepedia

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High-density MIM capacitors with HfO2 dielectrics

49

Citations

3

References

2004

Year

Tsu-Hsiu Perng, Chao‐Hsin Chien, Ching-Wei Chen, P. Lehnen, Chun–Yen Chang

Thin Solid Films

Electrical EngineeringDielectricsEngineeringHigh-frequency DeviceApplied PhysicsMicrowave CeramicMicroelectronicsMicrowave EngineeringHfo2 DielectricsElectrical Insulation

References

	Year	Citations

Page 1