Statistics
Publications
23
Citations
1K
H-Index
15
Active since
2000
P. Lehnen is an author at Aixtron (Germany) specializing in applied physics, engineering, and materials science.
Publications per year
2000–2010
23
23
P. Lehnen, W. Kleemann, Th. Woike et al. · The European Physical Journal B · 2000 · 336 citations · Full text
High-density MIM capacitors with HfO2 dielectrics
Tsu-Hsiu Perng, Chao‐Hsin Chien, Ching-Wei Chen et al. · Thin Solid Films · 2004 · 49 citations
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