23
Publications
1K
Citations
15
H-Index
2000
Active since
P. Lehnen is an author at Aixtron (Germany) specializing in applied physics, engineering, and materials science.
Top concepts
EngineeringApplied PhysicsMaterial ScienceElectrical EngineeringMicroelectronicsNanoelectronicsPhysicsSurface ScienceThin FilmsElectrical Insulation
Publications per year
2000–2010
23
23
P. Lehnen, W. Kleemann, Th. Woike et al. · The European Physical Journal B · 2000 · 336 citations · Full text
High-density MIM capacitors with HfO2 dielectrics
Tsu-Hsiu Perng, Chao‐Hsin Chien, Ching-Wei Chen et al. · Thin Solid Films · 2004 · 49 citations
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