Low-temperature passivation of copper by doping with Al or Mg

Copper Corrosion With and Without Inhibitors

V. Brusić, Margaret A. Frisch, Benjamin N. Eldridge et al. · Journal of The Electrochemical Society · 1991 · 312 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

Oxidation and protection in copper and copper alloy thin films

Jian Li, J. W. Mayer, E. G. Colgan · Journal of Applied Physics · 1991 · 257 citations

Natural Sciences, Materials Engineering, Materials Science +17

Advanced multilayer metallization schemes with copper as interconnection metal

S. P. Murarka, R.J. Gutmann, Alain E. Kaloyeros et al. · Thin Solid Films · 1993 · 246 citations

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Copper Transport in Thermal SiO2

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Metallization: theory and practice for VLSI and ULSI

Choice Reviews Online · 1993 · 209 citations

Natural Sciences, Electrical Engineering, Materials Science +17