IEEE Spectrum · 1998 · 26 citations · 0 references
EngineeringElectrical EngineeringSystems EngineeringMicroelectronicsMicrofabricationSemiconductor DevicesIntegrated Circuit DesignIntegrated Circuit FabricationMems DesignMems FabricationMicrofabrication ProcessesMicromachiningIntegration Of Mems ComponentsMicroelectromechanical System FabricationMicrofabricated SensorsMicromachining Of Silicon WafersSilicon Wafers
Micromachining mechanical, chemical, and optical components onto the same wafers as electronic circuits produces powerful systems that can understand and influence their environments.