A silicon condenser microphone with structured back plate and silicon nitride membrane

Silicon as a mechanical material

K. Petersen · Proceedings of the IEEE · 1982 · 2.9K citations

Engineering, Materials Engineering, Materials Science +13

A batch-fabricated silicon capacitive pressure transducer with low temperature sensitivity

Y. S. Lee, K.D. Wise · IEEE Transactions on Electron Devices · 1982 · 217 citations

Engineering, Electrical Engineering, Mechanical Engineering +17

ZnO on Si integrated acoustic sensor

Michel Royer, J. Holmen, M. A. Wurm et al. · Sensors and Actuators · 1983 · 153 citations

Engineering, Electrical Engineering, Acoustics +9

The impact of MOSFET-based sensors

P. Bergveld · Sensors and Actuators · 1985 · 126 citations · Full text

Engineering, Electrical Engineering, Microelectronics +11

On the acoustical resistance due to viscous losses in the air gap of electrostatic transducers.

Zdeněk Škvor · Acustica · 1968 · 108 citations

Engineering, Electrical Engineering, Physics +11