ZnO on Si integrated acoustic sensor

Silicon as a mechanical material

K. Petersen · Proceedings of the IEEE · 1982 · 2.9K citations

Engineering, Materials Engineering, Materials Science +13

High-Speed Fabrication of High-Quality Sputtered ZnO Thin-Films for Bulk and Surface Wave Applications

Tadashi Shiosaki · 1978 · 36 citations

Natural Sciences, Materials Engineering, Materials Science +15

Fabrication and characterization of ZnO piezoelectric films for sensor devices

Tadashi Shiosaki, Takeshi Yamamoto, Akira Kawabata et al. · 1979 · 13 citations

Natural Sciences, Materials Engineering, Materials Science +17

Thin Film ZnO-MOS Transducer with Virtually DC Response

P.L. Chen, R. S. Mueller, R.M. White et al. · 1980 · 12 citations

Engineering, Electrical Engineering, Materials Science +17