High-Speed Fabrication of High-Quality Sputtered ZnO Thin-Films for Bulk and Surface Wave Applications

dc triode sputtered zinc oxide surface elastic wave transducers

F.S. Hickernell · Journal of Applied Physics · 1973 · 169 citations

Natural Sciences, Materials Engineering, Materials Science +16

rf sputtering of ZnO shear-wave transducers

H. W. Lehmann, Roland Widmer · Journal of Applied Physics · 1973 · 64 citations

Natural Sciences, Materials Engineering, Materials Science +16

Low-frequency piezoelectric-transducer applications of ZnO film

Tadashi Shiosaki, Akira Kawabata · Applied Physics Letters · 1974 · 44 citations

Natural Sciences, Materials Engineering, Materials Science +17

RF Diode Sputtered ZnO Transducers

John D. Larson, Donald K. Winslow, L. Zitelli · IEEE Transactions on Sonics and Ultrasonics · 1972 · 34 citations

Engineering, Materials Engineering, Materials Science +9

Piezoelectric DMOS strain transducers

K. W. Yeh, R.S. Muller · Applied Physics Letters · 1976 · 12 citations

Engineering, Electrical Engineering, Physics +15