MEMS-based microthruster with integrated platinum thin film resistance temperature detector (RTD), heater meander and thermal insulation for operation up to 1,000°C

MEMS-based satellite micropropulsion via catalyzed hydrogen peroxide decomposition

Darren L. Hitt, Charles Zakrzwski, Michael A. Thomas · Smart Materials and Structures · 2001 · 219 citations · Full text

Investigation of high-temperature degradation of platinum thin films with an in situ resistance measurement apparatus

Samara L. Firebaugh, Klavs F. Jensen, Martin A. Schmidt · Journal of Microelectromechanical Systems · 1998 · 189 citations

Engineering, Thin Film Process Technology, Nanotribology +17

Comparison of the agglomeration behavior of thin metallic films on SiO2

Parag Gadkari, Andrew P. Warren, R Todi et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2005 · 162 citations

Materials Engineering, Materials Science, Surface Characterization +14

A MEMS-based solid propellant microthruster with Au/Ti igniter

Kaili Zhang, S.K. Chou, Simon S. Ang et al. · Sensors and Actuators A Physical · 2005 · 142 citations

Materials Science, Engineering, Micromachines +5

Oxygen diffusion through thin Pt films on Si(100)

R. Schmiedl, V. Demuth, P. Lahnor et al. · Applied Physics A · 1996 · 87 citations

Materials Science, Engineering, Thin Pt Films +5