W. Legner

Structural and electronic characterization of β-SiC films on Si grown from mono-methylsilane precursors

G. Krötz, W. Legner, Gerhard Müller et al. · Materials Science and Engineering B · 1995 · 45 citations

Materials Science, Materials Engineering, β-Sic Films +8

Silicon Carbide As A Mechanical Material

G. Krötz, W. Legner, C. Wapner et al. · Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95 · 2005 · 31 citations

Engineering, Mechanical Engineering, Silicon Carbide +16

MEMS-based microthruster with integrated platinum thin film resistance temperature detector (RTD), heater meander and thermal insulation for operation up to 1,000°C

Natsuki Miyakawa, W. Legner, Thomas Ziemann et al. · Microsystem Technologies · 2012 · 23 citations

Materials Science, Electrical Engineering, Engineering +14

Chemical Contamination Sensor for Phosphate Ester Hydraulic Fluids

Sumit Paul, W. Legner, Angelika Krenkow et al. · International Journal of Aerospace Engineering · 2010 · 20 citations · Full text

Chemical Engineering, Environmental Monitoring, Ndir Monitoring +15

Formation of epitaxial diamond-silicon carbide heterojunctions

Paul R. Chalker, C. Johnston, S. Romani et al. · Diamond and Related Materials · 1995 · 13 citations

Materials Engineering, Materials Science, Engineering +3